Traceability of sub-nm length measurements
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Title:
Electronic System for Control of a Thermally Actuated Alignment Device
Author(s):
R. Yang
,
J. van Schieveen
,
S. Nihtianov
and
J. Spronck
Year:
2010
Book title:
IEEE ICIT’2010
Event name:
ICIT’2010
Event place:
Vina del Mar, Chile
Event date:
2010 - 03
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