Traceability of sub-nm length measurements
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Title:
Highly-stable Electronic Sensor Interface for Capacitive Position Measurement
Author(s):
R. Nojdelov
and
S. Nihtianov
Journal:
Key Engineering Materials
Year:
2014
Month:
May
Volume:
613
Pages:
51-57
DOI:
10.4028/www.scientific.net/KEM.613.51
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