Title: |
Measurement of length, surface form and thermal expansion coefficient of length bars up to 1.5 m using multiple wavelength phase stepping interferometry |
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Author(s): | |
Journal: | Meas. Sci. Technol. |
Year: | 1994 |
Volume: | 5 |
Pages: | 694-703 |
DOI: | 10.1088/0957-0233/5/6/009 |