Combined optical interferometer for high precision dimensional metrology
Author(s):
G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgens, G. Mana, E. W. Palmer, C. J. Robbie, M. Stedman, J. Stümpel, A. Yacoot and G. Zosi
