Traceability of sub-nm length measurements
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Title:
Performance Optimization of Self-Alignment System for Capacitive Sensors
Author(s):
J. van Schieveen
,
R. Yang
,
S. Nihtianov
and
J. Spronck
Year:
2011
Book title:
Proc. Of IEEE ICM’11
Event name:
ICM’11
Event place:
Istanbul, Turkey
Event date:
2011 - 04 - 13-15
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