Traceability of sub-nm length measurements
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Title:
Common path two-wavelength homodyne counting interferometer development
Author(s):
P. Křen
and
P. Balling
Journal:
Meas. Sci. Technol.
Year:
2009
Volume:
20
Pages:
084009 (4pp)
DOI:
10.1088/0957-0233/20/8/084009
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