Title: |
From Nanometre to Millimetre: A Feasibility Study of the Combination of Scanning Probe Microscopy and Combined Optical and X-ray Interferometry |
|---|---|
| Author(s): | and |
| Journal: | Meas. Sci. Technol. |
| Year: | 2003 |
| Volume: | 14 |
| Pages: | N59-N63 |
| DOI: | 10.1088/0957-0233/14/9/402 |