Traceability of sub-nm length measurements
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Title:
Vectorial ray-based diffraction integral
Author(s):
B. Andreas
,
G. Mana
and
C. Palmisano
Journal:
J. Opt. Soc. Am. A
Year:
2015
Month:
July
Day:
2
Volume:
32
Issue:
8
Pages:
1403-1424
DOI:
10.1364/JOSAA.32.001403
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