Title: |
Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy |
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Author(s): | and |
Journal: | SPIE Proceedings |
Year: | 2014 |
Month: | August |
Day: | 18 |
Volume: | 9203 |
Pages: | 920308 |
DOI: | 10.1117/12.2060537 |