Traceability of sub-nm length measurements
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Title:
A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry
Author(s):
G. N. Peggs
and
A. Yacoot
Journal:
Phil. Trans. R. Soc. Lond. A
Year:
2002
Volume:
360
Pages:
953-968
DOI:
10.1098/rsta.2001.0976
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