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A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

Author(s): J. Seppä, V. Korpelainen, M. Merimaa, G. B. Picotto and A. Lassila
Journal: Meas. Sci. Technol.
Year: 2011
Volume: 22
Pages: 094027
DOI: 10.1088/0957-0233/22/9/094027

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