Highlights

 "Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology", Poul Erik Hansen et al., Frontiers in Physics vol 9, 791459 (2022)    

In this work, we demonstrate how the measurement accuracy on three-dimensional periodic structures may be increased by measuring the same periodic structure with multiple techniques and applying a χ²-regression method that finds the best solution based on the input from all the instruments. We find that it is possible to measure the critical dimension with an uncertainty of 0.1 nm..

Best Student Presentation Awards for Tim Käseberg

Tim Käseberg received best student presentation awards on his outstanding work on

Mueller matrix microscopy with machine learning inspired nanoform evaluation  at the ICO-25 in Dresden (05.-09. September 2022)

and on  Nanoform evaluation approach using Mueller matrix microscopy and machine learning concepts at the EOSAM2023 in Porto (12.-16. September 2022)

EPJ Web of Conferences 266, 10007 (2022),   https://doi.org/10.1051/epjconf/202226610007

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