The project EMPIR 16NRM05 "Ion gauge"

The project aims at developing an ionization gauge that is worth to standardize. To this end, the sensitivity of the ion gauge should be short and long-term stable, robust against transport, bake-outs etc. In particular, the relative gas sensitivity factors shall be predictable for this gauge and the gauge shall be useful for calibration of quadrupole mass spectrometers and other ionization gauges.

The project started on June 1, 2017 and originally had a duration of 3 years. Due to the Covid-19 pandemia it was extended to November 2020.

Model gauge developed in this project, manufactured by our partners INFICON and VACOM.