317. PTB-Seminar "VUV and EUV Metrology" 2021
The sixth seminar in a series launched in 2011 is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.
The seminar will be a hybrid event online and onsite in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.
Confirmed invited speakers
- M. van de Kerkhof, ASML
- H. Enkisch, Carl Zeiss SMT
- V. Philipsen, imec
- T. Feigl, optiXfab
- S. Gissot, ROB
- K. Tiedtke, DESY
- J. Feikes, HZB
- S. Danylyuk, ILT
- A. Szelghemi, IAP
- H. Stiel, MBI
Please find further information at www.euv2021.ptb.de.
Links: