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317. PTB-Seminar "VUV and EUV Metrology" 2021

The sixth seminar in a series launched in 2011 is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.


The seminar will be a hybrid event online and onsite in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.


Confirmed invited speakers


  • M. van de Kerkhof, ASML
  • H. Enkisch, Carl Zeiss SMT
  • V. Philipsen, imec
  • T. Feigl, optiXfab
  • S. Gissot, ROB 
  • K. Tiedtke, DESY
  • J. Feikes, HZB
  • S. Danylyuk, ILT
  • A. Szelghemi, IAP
  • H. Stiel, MBI

Please find further information at www.euv2021.ptb.de.