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Metrology with Synchrotron Radiation

The Physikalisch-Technische Bundesanstalt (PTB) is the national metrology institute and the highest authority when it comes to correct and reliable measurements in Germany. Since 1982, PTB has also been using synchrotron radiation for metrological tasks. The more than 75 employees of the departments 7.1 Radiometry with Synchrotron Radiation and 7.2 X-ray Metrology with Synchrotron Radiation maintain and use for this purpose a Laboratory at the storage ring BESSY II of the Opens external link in new windowHelmholtz-Zentrum Berlin (HZB) as well as PTB's own Metrology Light Source (MLS) in Berlin-Adlershof.

The main focus of the work is on the following areas:

  •  Fundamentals of metrology, radiometry
  •  Metrology for industry, EUV lithography
  •  Research and development for optical technologies, space instruments
  •  Materials metrology, nanometrology


On May 23, 2023 this year's QUNOM (Quantification of Uncertainties in Nano Optical Metrology) workshop welcomed participants from different European countries. It was hosted by the XUV group at the University of Twente and co-organized by Dr. Sebastian Heidenreich (PTB Working Group 8.43 Modelling and Simulation) and Dr. Victor Soltwisch (Working Group 7.14 EUV Nanometrology).

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