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Metrology with Synchrotron Radiation

The Physikalisch-Technische Bundesanstalt (PTB) is the national metrology institute and the highest authority when it comes to correct and reliable measurements in Germany. Since 1982, PTB has also been using synchrotron radiation for metrological tasks. The more than 70 employees of the departments 7.1 Radiometry with Synchrotron Radiation and 7.2 X-ray Metrology with Synchrotron Radiation maintain and use for this purpose a Laboratory at the storage ring BESSY II of the Opens external link in new windowHelmholtz-Zentrum Berlin (HZB) as well as PTB's own Metrology Light Source (MLS) in Berlin-Adlershof.

The main focus of the work is on the following areas:

  •  Fundamentals of metrology, radiometry
  •  Metrology for industry, EUV lithography
  •  Research and development for optical technologies, space instruments
  •  Materials metrology, nanometrology


Fourier transform infrared (FTIR) spectroscopy is a powerful technique in analytical chemistry. Typically, spatially distributed spectra of the substance of interest are registered simultaneously using FTIR spectrometers equipped with array detectors. Scanning methods such as near-field FTIR spectroscopy are a promising alternative providing higher...

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A nanospectroscopic device platform has been developed for the thermoelectric detection of molecular fingerprints of soft materials at nanometer scale spatial resolution. The technique makes use of a locally generated thermal gradient converted into a thermoelectric voltage that is read out in the underlying device. The thermal gradient is generated by an illuminated atomic force microscope tip...

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The metrological support of the German and European industries in the development of EUV lithography for semiconductor manufacturing is a major activity of PTB at its Berlin-Adlershof site. The close cooperation with ZEISS since 1998 forms a significant basis for the continuous development of PTB's metrological capabilities in the extreme ultraviolet spectral range (EUV). Based on the use of...

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