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Nanostructuring and Clean Room Center Infrastructure

Working Group 2.44

200 kV- Transmission-Electron-Microscope (TEM) with scanning unit (STEM)

Emitter  Schottky-field-emission cathode, beam energy up to 200 keV
Objective "Super-Twin"-Objective
resolution < 0.24 nm
projective system direct magnification 25 - 1 100 000 x
Detectors EDX-Detector
Dark and bright-field ringdetector
TV-camera
1k-CCD camera