Röntgenanalytik für 450-mm-Wafer
PTB-News 1.2015
07.04.2015
Vorteile
- comprehensive 450 mm wafer characterization in one tool with a 1 m2 footprint
- 2D scanning
- adjustment of the crystal orientation at any wafer location
- maximum reliability and reproducibility
Ansprechpartner Technologieangebote:
Andreas Barthel
Telefon: (0531) 592-8307
E-Mail: andreas.barthel(at)ptb.de
Technologietransfer