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Last update: 24/05/2006

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Draft Programme


Monday, April 24

8:00

Registration


Session A             Instrumentation and Methods

9:00

Welcome address

R. Thalmann, G. Wilkening

9:15

Investigation and calculations into decreasing the uncertainty of a NPM machine

I. Schmidt, T. Hausotte, U. Gerhardt, E. Manske, G. Jäger (TU, Ilmenau, DE)

9:40

Nanoscale surface measurements at side walls of nano micro structures

G. Dai, H. Wolff, M. Xu, F. Pohlenz, H.-U. Danzebrink (PTB, Braunschweig, DE)

10:05

The Nanostation 300-Development of an SPM for large objects

K. Dirscherl, S.Czerkas, H.Bosse, H.-A. Fuß (PTB, Braunschweig, DE)

10:30

Coffee break

11:00

Conventional coordinate measurement and nanometrology: Evaluation and reduction of parasitic effects

M.Gruhlke (Helmut Schmidt University, Hamburg, DE)

11:25

Scanning performance of an ultra precision Micro-CMM using a low force 3 D touch probe

A. Küng, F. Meli, R. Thalmann (METAS, Bern, CH)

11:50

The role of tip geometry and tip-sample interactions in scanning probe microscopy

A. Yacoot (NPL, Teddington, GB), L. Koenders (PTB Braunschweig, DE)

12:15

Lunch break and Poster session



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Session B                     Application

14:00

Preliminary study on nano particle sizes under the APEC Technology Cooperative Framework

W. Fu, G.S. Peng, (CMS, ITRI, Taiwan)

14:25

Profile characterization with combined AFM and spectroscopic scatterometry

L. L. Kildemark1, A. Kühle1, I. Daví1, F. Borsetto1, J. C. Petersen1, J. Garnæs1, P.-E. Hansen2, N. Agersnap2, J. Holm3, L. H. Christensen4,
L. H. Thamdrup5 Andrej Mironov5 and A. Kristensen5

(1Danish Fundamental Metrology, Kgs. Lyngby, DK, 2LuKa Optoscope, Rørmose Parkvej 50, Farum, DK, 3Ibsen Photonics, Farum, DK, 4Centre for Microtechnology and Surface Analyses, Teknologisk Institut, Taastrup, DK, 5MIC - Department of Micro and Nanotechnology, Technical University of Denmark (DTU), Lyngby DK)

14:50

Precise 3D-characterization of micro and nanostructured materials by means of confocal microscopy

M.Weber, (NanoFocus AG, Oberhausen, DE)

15:15

AFM investigation on possible surface damages caused by mechanical probing with small ruby spheres

F. Meli, (METAS, Bern-Wabern, CH)

15:40

Coffee break

16:10


Deformation measurements at the nanoscale

J. Keller1,2), A. Gollhardt1), D. Vogel1), B. Michel1)
(1)Fraunhofer Institute for Reliability and Microintegration (IZM), Berlin, DE,
2)AMIC, Angewandte Micro-Messtechnik GmbH, Berlin, DE)

16:35

Atomic force microscopy studies of cross-sections of columnar thin films

P. Klapetek¹, I. Ohlidal² (¹Czech Metrology Institute, Brno, CR, ² Faculty of Masaryk University, Brno, CR)

17:00

New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

E. Manske, R. Mastylo, T. Machleidt, K.-F. Franke, G. Jäger (TU Ilmenau, DE)

17:25

End of first day; departure for Conference Dinner

18:30

Apéro at Gurten

19:30

Conference Dinner at Gurten




Tuesday, April 25

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Session C          Calibration & Corr. Methods

8:30

Technical announcements

8:35

Two-dimensional encoder with picometer resolution using lattice spacing on regular crystalline surface as standard

M. Aketagawa, H. Honda, M. Ishige, C. Patamaporn (Department of Mechanical Engineering, Nagaoka University of Technology, JP)

9:10

Calibration strategies for scanning probe metrology

K.R. Koops., M.G.A. van Veghei, G.J.W.L. Kotte (NMI, Delft, NL)

9:35

A landmark based 3D calibration strategy for SPM

M. Ritter, A. Kranzmann, (BAM, Berlin), T. Dziomba, L. Koenders (PTB, Braunschweig, DE)

10:00

Coffee break and Poster presentation

11:00

Calibration of a commercial AFM: interferometric traceability for co-ordinate system

V. Korpelainen, A. Lassila (MIKES, Espoo, FI)

11:25

Detecting and addressing the surface following errors in the calibration of step heights by atomic force microscopy

J. Haycocks (NPL, Teddigton, UK)

11:50

Calibration issues in line scale based 3-D nano and micro CMMs

R. Bergmans, G. Kotte, (NMI, Delft, NL)

12:15

Lunch break

13:15

Higher order tip effects in traceable AFM-based linewidth measurements

NG Orji, RG Dixon ( NIST, Gaithersburg, USA)

13:40

CD Characterization of Nanostructures in SEM Metrology

C.G. Frase, E. Buhr, K. Dirscherl (PTB Braunschweig, DE)

14:05

Final remarks + closure of the seminar

14:15

Coffee

14:30

16:00


Guided lab tours

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© Physikalisch-Technische Bundesanstalt, L. Jusko

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