Traceability of sub-nm length measurements
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Title:
Simple heterodyne laser interferometer with subnanometre periodic errors
Author(s):
K. N. Joo
,
J. D. Ellis
,
J. W. Spronck
,
P. J. M. van Kan
and
R. H. Munnig Schmidt
Journal:
Opt. Lett.
Year:
2009
Volume:
34
Issue:
3
Pages:
386-388
DOI:
10.1364/OL.34.000386
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