Traceability of sub-nm length measurements
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Title:
Calibration of nanosensors with direct traceability to the Metre
Author(s):
R. Bergmans
,
H. Haitjema
,
S. Wetzels
and
P. Schellekens
Journal:
Proc. SPIE
Year:
2001
Volume:
4401
Pages:
217-226
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