Traceability of sub-nm length measurements
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Title:
Phase corrections in the optical interferometer for Si sphere volume measurements at NMIJ
Author(s):
B. Andreas
,
L. Ferroglio
,
K. Fujii
,
N. Kuramoto
and
G. Mana
Journal:
Metrologia
Year:
2011
Volume:
48
Pages:
S104-S111
DOI:
10.1088/0026-1394/48/2/S13
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