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Title:

A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm
Author(s): C. Weichert, P. Köchert, R. Köning, J. Flügge, B. Andreas, U. Kuetgens and A. Yacoot
Journal: Meas. Sci. Technol.
Year: 2012
Volume: 23
Pages: 094005 (7pp)
DOI: 10.1088/0957-0233/23/9/094005

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