Traceability of sub-nm length measurements
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Title:
Design and characterization of MIKES metrological atomic force microscope
Author(s):
V. Korpelainen
,
J. Seppä
and
A. Lassila
Journal:
Precision Engineering
Year:
2010
Volume:
34
Issue:
2
Pages:
735-744
DOI:
10.1016/j.precisioneng.2010.04.002
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