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Title:

Toward interferometry for dimensional drift measurements with nanometer uncertainty
Author(s): D. Voigt, J. D. Ellis, A. L. Verlaan, R. H. Bergmans, J. W. Spronck and R. H. Munnig Schmidt
Journal: Meas. Sci. Technol.
Year: 2010
Volume: 22
Pages: 094029
DOI: 10.1088/0957-0233/22/9/094029

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