Traceability of sub-nm length measurements
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Title:
High accuracy laser diffractometer: angle-scale traceability by error separation method with a grating
Author(s):
V. Korpelainen
,
A. Iho
,
J. Seppä
and
A. Lassila
Journal:
Meas. Sci. Technol.
Year:
2009
Volume:
20
Pages:
084020 (8pp)
DOI:
10.1088/0957-0233/20/8/084020
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