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Title:

Design and calibration of a parallel-moving displacement generator for nano-metrology
Author(s): H. Haitjema, N. Rosielle, G. Kotte and H. Steijaert
Journal: Meas. Sci. Technol.
Year: 1998
Volume: 9
Pages: 1098-1104
DOI: 10.1088/0957-0233/9/7/016

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