Traceability of sub-nm length measurements
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Title:
Optimized Low-Power Thermal Stepper System for Harsh and Inaccessible Environment
Author(s):
R. Yang
,
J. van Schieveen
,
S. Nihtianov
and
J. Spronck
Year:
2010
Book title:
Proc. IEEE IECON’10
Event name:
IECON’10
Event place:
Phoenix, AZ, USA
Event date:
2012 - 11 - 7-10
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