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Title:

Calibration strategies for scanning probe metrology
Author(s): K. R. Koops, M. G. A. van Veghel, G. J. W. L. Kotte and M. C. Moolman
Journal: Meas. Sci. Technol.
Year: 2007
Volume: 18
Pages: 390
DOI: 10.1088/0957-0233/18/2/S10

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