of the seminar
quantitative determination of the properties of micro- and nano
structures is essential in research and development and is a
prerequisite in process control and quality assurance in industry. The
knowledge of the geometrical dimensions of structures in most cases is
the base, to which other physical and chemical properties are linked.
Quantitative measurements presuppose reliable and stable instruments,
suitable measurement procedures as well as suitable calibration
artefacts and methods.
The seminar will stimulate the exchange of information between users in
science and industry and manufacturers of relevant hard- and software.
Topics to be addressed
novel/improved instruments and
probe/sample positioning, position-measuring systems, novel/improved
probe/detector systems, linearization methods, image
& correction methods
methods, calibration standards, calibration
procedures, traceable measurements, standardization, uncertainty of
quantitative measurements and measurement problems in:
micro electronics, micro systems technology, nano/quantum/molecular
electronics, chemistry, biology, medicine, environmental technology,
surface science, materials science, surface processing
techniques or applications
(SWNT, MWNT) in metrology; Metrology for nanobiology/-chemistry