Scope of the seminar

The quantitative determination of the properties of micro- and nano structures is essential in research and development and is a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements presuppose reliable and stable instruments, suitable measurement procedures as well as suitable calibration artefacts and methods.

The seminar will stimulate the exchange of information between users in science and industry and manufacturers of relevant hard- and software.

Topics to be addressed

Instrumentation and methods
novel/improved instruments and methods, repeatable probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

Calibration & correction methods
calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
 
Applications
quantitative measurements and measurement problems in: micro electronics, micro systems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, surface science, materials science, surface processing

Carbon nanotube (SWNT, MWNT) in metrology; Metrology for nanobiology/-chemistry