recent selected publications of consortium members

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Title:

Imaging scatterometry for flexible measurements of patterned areas

Author(s): Morten Hannibal Madsen and Poul-Erik Hansen
Journal: Optics Express
Year: 2016
Month: January
Day: 25
Volume: 24
Issue: 2
Number 2: 1109-1117
DOI: 10.1364/OE.24.001109

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