Traceability of sub-nm length measurements
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Title:
Single shot lateral shear interferometer with variable shear
Author(s):
C. Falldorf
and
R. B. Bergmann
Journal:
Opt. Eng.
Year:
2015
Month:
May
Day:
20
Volume:
54
Issue:
5
Pages:
054105
DOI:
10.1117/1.OE.54.5.054105
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