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Accuracy evaluation for sub-aperture interferometry measurements of a synchrotron mirror using virtual experiments

Author(s): A. Wiegmann, M. Stavridis, M. Walzel, F. Siewert, T. Zeschke, M. Schulz and C. Elster
Journal: Precision Engineering
Year: 2011
Volume: 35
Issue: 2
Pages: 183-190
DOI: 10.1016/j.precisioneng.2010.08.007

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