Traceability of sub-nm length measurements
Home
The Project
Work Packages
The Consortium
Publications
Downloads
Contact
Data Protection
Imprint
Publication single view
Title:
Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing
Author(s):
A. Wiegmann
,
M. Schulz
and
C. Elster
Journal:
Opt. Express
Year:
2010
Volume:
18
Pages:
15807-15819
DOI:
10.1364/OE.18.015807
Back to the list view