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Combined optical interferometer for high precision dimensional metrology

Author(s): G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgens, G. Mana, E. W. Palmer, C. J. Robbie, M. Stedman, J. Stümpel, A. Yacoot and G. Zosi
Journal: Proc. Roy. Soc. Lond. A
Year: 2000
Volume: 456
Pages: 701-729
DOI: 10.1098/rspa.2000.0536

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