MetAMC - Metrology for airborne molecular contamination in manufacturing environments

Industrial micro-fabrication processes are happening on ever smaller scale, bringing new challenges regarding environmental control, especially cleanliness.  Airborne molecular contamination (AMC) is chemical contamination in the form of gases, vapours or aerosols that has adverse effects on products, processes or instruments in clean room manufacturing environments.

The MetAMC project (05/2013 - 04/2016) has developed field-deployable optical instruments for online measurement of AMCs in clean rooms and AMC reference materials for instrument calibration. High technology manufacturing industries such as semiconductor, nanotechnology and photovoltaics will now be able to define critical AMC sources, optimise microfabrication processes and enable fast corrective actions in production. As a result, product quality will be improved, yield losses and process shut down times will be decreased and competitiveness will be increased.

Please download the final publishable summary or the final project report to learn more!

To read about the latest developments in this area, check on the MetAMC-II website. This new programme of work started on 1 May 2018 and builds on the successful outcomes of the first MetAMC project. 

Previous Events

MetAMC workshop

Our workshop on Airborne Molecular Contamination: Sampling, generation & measurement was held on Monday, 26 October 2015 prior to the Opens external link in new windowCleanzone 2015 at Messe Frankfurt. In this workshop we addressed ultra-sensitive optical techniques for AMC measurements, traceable reference material generation, reliable and practical sampling of AMCs and results from laboratory and field tests (follow this link to download the workshop flyer).

We kindly thank all participants for their interest, helpfull feedback, and fruitful discussions!

Laser Applications to Chemical, Security and Environmental Analysis (LACSEA)

25 - 28 July 2016
Heidelberg, Germany 

17th International Congress of Metrology

Paris, France

8th International Gas Analysis Symposium & Exhibition (GAS2015)

Beurs-WTC Rotterdam, the Netherlands

Pittcon 2015 Conference & Expo

Ernest N. Morial Convention Center
New Orleans, LA USA

DGaO 2014

Karlsruhe, Germany


Frankfurt, Germany


DGaO 2013

Braunschweig, Germany

Laser World of Photonics

Munich, Germany

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5. Gassensor Workshop

Fraunhofer IPM, Freiburg, Germany

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