6DoF Final Workshop May 30, 2016

University of Nottingham, UK

Workshop description

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PresentationSpeakerPDF
Introduction to IND58Jens Flügge, PTBPDF
Flatness measurements of machine reference mirrorsG. Ehret, PTBPDF
Straightness measurements at the nanometer comparatorC. Weichert, PTBPDF
Multilateration for encoder characterisation on the base of a nanomeasuring testbedE. Manske, TU-ILPDF
Coordinate interferometric measurement with infrared telecom laser diodeJ. Lazar, ISIPDF
Camera based interferometer for simultaneous measurement of 6DoF from a single interfaceG. Molnar, PTBPDF
A testbed for nanopositioning devicesA. Yacoot, NPLPDF
Metrological high speed AFMA. Yacoot, NPL PDF
Large range AFM metrologyN. Vorbringer-Dorozhovets, TU-ILPDF
Calibration and correction of a 6 degree of freedom piezo driven stageA. Küng, METASPDF