Vacuum metrology for production environments

Vacuum is an important and indispensable tool for many industrial applications from the semiconductor industry, photovoltaic, lightning industry to food packaging to name just a few examples.

EMRP IND12 "Vacuum metrology for production environments" was a project funded by the European Metrology Research Programme. The vacuum metrology sections of 7 National Metrology Institutes and 5 industrial companies formed a consortium to open new measurement capabilities for vacuum and to help industry to characterize vacuum in industrial environments.

In three technical workpackages (WP) the project dealt with fast changing vacuum pressures (WP1), leak rate measurement (WP2), and partial pressure and outgassing rate measurement (WP3).

Nanotechnology was explored to develop new types of leak elements and prototypes of outgassing samples as reference.

The duration of the project was from September 2011 to August 2014.