The project 14SIP01 "Vacuum ISO"

The purpose of project 14SIP01 was to develop two Technical Specifications on the ISO level:

The first Technical Specification (ISO TS 20175) is on how to characterise and calibrate quadrupole mass spectrometers (QMS), and the second (ISO TS 20177) is on how to perform traceable outgassing rate measurements. These two Technical Specifications, closely related to each other, should enable the improvement of materials for vacuum, e.g. for the semiconductor industry, and make the control of partial pressures in industrial processes more reliable. The Technical Specifications should also help manufacturers of QMS to improve the metrological performance of these devices.

The project started in May 2015 and ended successfully in April 2018. Both TS were published and are available from Opens external link in new windowISO.

Principal of quadrupole mass spectrometer (QMS)