WP1: Samples selection, deterimination and characterisation of surface texture parameters and, in some cases, dimensional properties 

The aim of this work package is to determine and characterise relevant surface texture parameters and dimensional properties of suitable samples for studies in WP2 with reference instruments. The samples will consist of i) commercially available well-known roughness standards (profile and areal) ii) typical machined technical surfaces including samples fabricated by classical manufacturing methods and by new manufacturing technologies, (iii) spheres with different surface characteristics and (iv) solid roughness samples from biology and medicine, (v) calibration standards to characterise the instruments. Profile and areal surface texture are also referred to as 2D and 3D roughness respectively in this document.

Task 1.1 aims to determine and characterise the relevant surface texture parameters of roughness standards (profile and areal with Ra between 20 nm to 1100 nm

Task 1.2 aims to determine and characterise the relevant roughness parameters and dimensional properties of technical surfaces machined by classical manufacturing methods such as turning, milling, grinding or polishing and by new manufacturing technologies such as focused ion beam (FIB) or additive manufacturing.

Task 1.3. aims to determine the dimensional properties and relevant surface roughness parameters of the spheres with different materials and roughness characteristics.

Task 1.4 aims to determine relevant surface roughness parameters and dimensional properties of the solid roughness samples from biology and medicine.

Task 1.5 to select and characterise calibration standards for the characterization of optical instruments.

WP2: Characterisation of the measurement capabilites of 3D optimal instruments 

The aim of this work package is to characterise the measurement capabilities of 3D optical microscopy, AMI interferometric nanoscopy and optical distance sensors.

Task 2.1 aims to characterize the measurable slope and curvature of optical instruments (including CM, CSI, FV, ODS) with different hardware setups (magnification, AN, orientation of the test objects) using optically smooth and matt spheres.

Task 2.2 aims to characterize the lateral bandwidth of the optical instruments by comparing the power spectrum density diagrams measured by the optical instruments with different magnifications and by reference instruments.

Task 2.3 aims to characterize the measurement noise of the optical instruments by using an optical flat.

Task 2.4 aims to investigate the Influence of the bidirectional reflectance distribution function (BRDF) of the samples on the measurement results of the optical instruments.

Task 2.5 aims to determine the topographic spatial resolution of the optical instruments

WP3:  Numerical modelling and systematic error analysis

The aim of this work package is to develop numerical models that predict the response for any complex surface geometry, and to allow such models to be used for systematic error analysis and error correction. Multiple ways to model light diffraction/scattering by a surface will be used: some approximate and some based on rigorous solutions of Maxwell’s equations. These two approaches will be used in the virtual systems depending on the conditions of the specific surface and the validity regimes of the models.

Task 3.1 aims to develop 3D models that allow the prediction of the scattering/diffraction of light from any surface geometry.

Task 3.2 aims to develop models for the CSI, CM, FV and ODS instruments.

Task 3.3 aims to verify the virtual instruments developed in Task 3.2 by comparison with each other and with measurements with real instruments for selected surfaces

Task 3.4 aims to use each of the virtual measurement systems from Task 3.2 to evaluate the measurement uncertainty of CSI, CV, CM instruments and optical distance sensors (ODS).

WP 4: Selection of appropriate instrumentation and procedures for data evaluation and uncertainty estimation

The aim of this work package is to develop and validate procedures for the selection of appropriate instrumentation for a given measurand (objective 4). Target uncertainties for optical roughness measurements are 5 nm (10% deviation for 50 nm < Sq < 100 nm) and 100 nm for optical dimensional measurements.

Task 4.1 aims to select the appropriate optical instruments for different samples, based on the results of WP1 and WP2.

Task 4.2 aims to develop and implement data evaluation methods focusing on stitching of two or more single optical images to obtain larger measuring field widths.

Task 4.3 aims to develop two good practice guides for helping the user to develop a practical approach to uncertainty estimation.