PTB is the German NMI and has expertise in the investigation of characterisation and traceability of optical topography measurement procedures, optical coordinate metrology, and the development of appropriate material measures. Reference instruments for low uncertainty roughness, micro-form and dimensional measurements are available. Furthermore, PTB has expertise in virtual metrology and in traceable in-process dimensional measurements and is active in the standardisation in the field of surface and coordinate metrology.
CEM is the Spanish NMI and has expertise in calibrating standards, instruments and measurement systems as required by accredited laboratories and edge industries, providing them with the necessary traceability. CEM is active in standardisation in dimensional metrology and nanometrology fields through the corresponding national standardisation body, UNE.
DFM is the Danish NMI has expertise in optical characterisation of nanostructures using classical and quantum metrology. DFM will develop a novel virtual confocal microscope based on rigours solution of Maxwell’s equations. The virtual microscope will then be used in the metrology characterisation and uncertainty evaluation of existing confocal microscope(s) for optical measurements.
GUM is the Polish NMI and has expertise in the field of length, coordinate, roughness and roundness. GUM has a tactile stylus profilometer and microscopic interferometer able to perform 3D measurements. GUM has experience in participation in international comparisons, including those involving nanometric standards.
INRIM is the Italian NMI and has expertise in the field of dimensional measurements, surface metrology and micro/nano fabrication of materials and devices. Traceable instruments (optical and tactile) for surface measurements and facilities for micro/nano fabrication are available. The INRIM is active in international and national standardisation committee on areal and profile surface texture (ISO and UNI).
LNE is the French NMI and has expertise in areal texture and form metrologies including the implementation of robust pre-processing and characterisation algorithms as well as the developing of specific reference material measures, mathematical modelling, ultra-high precision equipment design and end-user requirements. LNE has a primary scanning profilometer for reference areal surface texture measurements on specific innovative material standards (multi-scale and freeform surfaces) with an uncertainty below 10 nm.
RISE is the Swedish NMI and has expertise with tactile, optical and interferometric instruments as well as strong industrial connection. Close and long-standing cooperation with small, medium and large enterprises in Sweden and abroad ensure direct dissemination of project results to a wide range of end users through comparison and for the case studies.
VSL is the Dutch NMI and has expertise in optical dimensional metrology with a focus on computational microscopy. In house developed instruments and methodology include a hyper spectral scatterometer, a ptychography microscope. Furthermore, a Fizeau interferometer, AFM, and CMM are available for reference measurements. VSL has co-developed several reference artefacts for instrumentation characterisation.
CRF is an industrial organisation and has expertise in materials characterisation by optical assessment as reflection scattering and specular, transmission, and absorption for surfaces and interfaces properties joining with morphology and roughness measurements as interior trims, varnishes, glasses, plastic lens.
FAU is a research institute and has expertise in profile and areal tactile and optical roughness and dimensional measurements, the development of optical and tactile sensors for nanometrology and the development and improvement of nano measuring machines (NMM). Reference instruments (NMM), sensors (CSI, confocal, AFM) are available within highly stable measurement conditions (thermostating housing with a long-term temperature stability of 17 mK).
OST is a university of applied sciences and has expertise in the field of coordinate metrology and roughness metrology. In both fields, high precision measuring systems with tactile and optical systems are available. OST is accredited based on the ISO 17025 in coordinate and roughness metrology and runs its measuring systems equipped with both tactile and optical sensors in an air-conditioned measuring lab. Through the focus on application-oriented work, OST is strongly connected to industry.
TEKNIKER is a technology centre and has expertise in optimisation of characterisation processes to have a precise knowledge of industrial components, geometries, and roughness. TEKNIKER has a background and expertise (ENAC certification) in 2D and 3D measuring services with tactile and optical systems of surface features of a large range of samples.
TUC is a university and has expertise in high-resolution interferometry and nanoscopy (e.g. heterodyne interferometry, squeezed-light interferometry and absorbance modulation imaging and reflective-light nanoscopy). TUC coordinates the DFG-funded collaboration project NanoVidere exploring Absorbance Modulation Imaging (AMI) for reflection nanoscopy. In addition, TUC is an expert in polymer microoptics.
TU‑Ch is a university and has expertise experience in the development of measurement systems for geometrical properties. TU‑Ch will support the consortium with the advanced knowledge of the ISO GPS system in addition to the abilities on mathematical algorithm development for processing measured data form different instruments and their settings. A Confovis DuoVario with a combined confocal and focus variation measurement principle especially for 3D surface characterisation is available.
TUK is a university and has expertise in physical modelling and improvement of optical and tactile measuring instruments and the development of robust signal processing techniques like form separation, interpolation, data filtration and surface characterisation. At TUK, state of the art optical and tactile measuring instruments (a CM, a CSI and a high precision tactile instrument) and several ultraprecise manufacturing systems to manufacture a wide range of material measures are available.
UNI KASSEL is a university and has theoretical and practical expertise in optical 3D profilometry mainly using CSI, CM and interferometric as well as confocal fibre optic distance sensors. UNI KASSEL is equipped with a commercial CM, a contact stylus instrument, an AFM and a number of custom-made interference microscopes.
UNOTT is a university and has expertise in the traceability of profile and areal measurements. UNOTT developed the metrological characteristics approach that is now adopted in ISO 25178 part 600 and 700, plus material measures for the determination of the non-object dependent characteristics. UNOTT also has experience in CSI virtual instruments and all aspects of uncertainty evaluation for surface texture measurement.
Alicona is a manufacturer of high precision optical surface and dimensional metrology equipment based on the focus variation technology and has expertise in the development of optical 3D measurement devices based on focus variation. Their μCMM product was one of the first purely optical area- based 3D coordinate measurement devices capable of high-resolution roughness measurement as well as form and dimensional measurement.
GBS is a developer and manufacturer of CSI instruments. GBS has a background in the scientific research of nano positioning systems, customised vision and control systems and parallel image processing. GBS has production and laboratory facilities to manufacture and calibrate CSI instruments, respectively. These capabilities are important to precisely characterise surface topographies of special samples and to improve the measurement techniques involved.
twip is a small university spin off company and has expertise in the development of optical 3D measurement systems. To enable a highly flexible customization and aim for an integration of optical 3D measurement systems into production environments they developed a robust optical measurement system, based on confocal microscopy was developed.
ULEI is a university and has expertise in 3D optical surface texture measurement and the development of measuring and analysing routines for biological and anthropological samples. Optical instruments available are two confocal disc-scanning instruments.
Zygo is an instrument manufacturer and expertise in calibration and certification methods, including dimensional traceability via in-situ interferometric methods. The wide range of end-user markets for Zygo instruments, from semiconductor wafer lithography to additive manufacturing, provide Zygo scientists with a unique and well-grounded perspective on industry needs.