Pushing boundaries of nano-
dimensional metrology by light
A Joint Research Project within the European Metrology Research Programme EMPIR.
The EU wants to hold a dominant global position in nanotechnology, micro-nanoelectronics, photonics and advanced materials: four of the six Key Enabling Technologies (KETs) identified by the European Commission. However, such dominant position strongly depends on the availability of proper tools that can serve the metrology needs of those KETs in terms of speed, non-invasiveness, reliability and integrability.
This EMPIR project addresses these needs by pushing the boundaries of optical measurement methods by realising a new generation of optical metrology systems in the classical as well as in the quantum regime, with unprecedented performances in terms of spatial resolution, traceability, reliability, and robustness.