Publications

  1. U. Brand et al., Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm, Sensors 2019, 19(6); https://doi.org/10.3390/s19061410
  2. M. Fahrbach et al., Optimizing a cantilever measurement system towards high speed, nonreactive contact-resonance-profilometry, Eurosensors 2018 Proceedings, 2, 889, https://www.mdpi.com/2504-3900/2/13/889