Stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
Abstract:
In this talk the implementation, measurement procedure and the data analysis of a stand-alone EUV spectrometer is presented. The setup is used to determine optical constants and dimensional characteristics of samples, e. g. ultrathin films or nanoscale gratings, reconstructed from measurements of their broadband EUV reflectance at variable grazing incidence angles.
QUNOM_10:00-14:00_Soltwisch_Heidenreich
Uhrzeit: 6.Nov.2020 10:00 AM Amsterdam, Berlin, Rom, Stockholm, WienZoom-Meeting beitreten
Meeting-ID: 814 8734 3502
Schnelleinwahl mobil
+12532158782,,81487343502# Vereinigte Staaten von Amerika (Tacoma)
+13017158592,,81487343502# Vereinigte Staaten von Amerika (Germantown)