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Dr. Dr. Jens Simon
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Lens inspection using Multiple Aperture Shear Interferometry: Comparison to Wave Front Sensing Methods
Kategorien:
- Grundlagen der Metrologie
19.09.2018
We present a new method for lens inspection, called Multiple Aperture Shear Interferometry
(MArS) using the spatial coherence function of light as a primary
measurand. MArS allows the use of several independent light sources (illumination
apertures) at the same time. In this paper, we however only employ a single
light source in order to enable a direct comparision to wave front sensing.
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Karin Conring
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Anschrift
Physikalisch-Technische Bundesanstalt
Bundesallee 100
38116 Braunschweig