Leiter der Presse- und Öffentlichkeitsarbeit
Dr. Dr. Jens Simon
Telefon: (0531) 592-3005
E-Mail:
jens.simon(at)ptb.de
We present a new method for lens inspection, called Multiple Aperture Shear Interferometry
(MArS) using the spatial coherence function of light as a primary
measurand. MArS allows the use of several independent light sources (illumination
apertures) at the same time. In this paper, we however only employ a single
light source in order to enable a direct comparision to wave front sensing.
Dr. Dr. Jens Simon
Telefon: (0531) 592-3005
E-Mail:
jens.simon(at)ptb.de
Karin Conring
Telefon: (0531) 592-3006
Fax: (0531) 592-3008
E-Mail:
karin.conring(at)ptb.de
Physikalisch-Technische Bundesanstalt
Bundesallee 100
38116 Braunschweig