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Fertigungskette von Si-Kugeln und interferometrische Bestimmung des Kugelvolumens

AFM Strukturbreiten-Metrologie

Arbeitsgruppe 5.23

Publikationen

  • Gaoliang Dai et al. Development of a novel material measure for characterising instrument transfer function (ITF) considering angular-dependent asymmetries of areal surface topography measuring instruments, Proceeding of euspen’s 19th International Conference &Exhibition, Bilbao, ES, June 2019.
  • Timo Strahlendorff et al. Tip wear and tip breakage in high-speed atomic force microscopes, Ultramicroscopy 201 (2019) 28–37
  • Gaoliang Dai et al. Metrological large range magnetic force microscopy, Rev. Sci. Instrum. 89, 093703 (2018)
  • Gaoliang Dai et al. High-speed metrological large range AFM, Meas. Sci. Technol. 26 (2015) 095402
  • Gaoliang Dai et al. Fast and accurate: high-speed metrological large range AFM for surface and nanometrology Meas. Sci. Technol. 29 (2018) 054012
  • Gaoliang Dai et al. Fast and accurate: high-speed metrological large range AFM for surface and nanometrology Meas. Sci. Technol. 29 (2018) 054012
  • Gaoliang Dai et al. Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST, Meas. Sci. Technol. 28 (2017) 065010
  • Gaoliang Dai et al.  Gaoliang Dai, Ludger Koenders, Jens Fluegge, Harald Bosse, “Two approaches for realizing traceability in nanoscale dimensional metrology,” Opt. Eng. 55(9), 091407 (2016), doi: 10.1117/1.OE.55.9.091407.
  • Gaoliang Dai et al. Development and characterisation of a new line width reference material, Meas. Sci. Technol. 26 (2015) 115006
  • Dai, G., Hahm, K., Scholze, F. et al. 2014 Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM, Meas. Sci. Tech., 25(4)
  • Dai, G., Heidelmann, M., Kübel, C et al. 2013 Reference nano-dimensional metrology by scanning transmission electron microscopy, Meas. Sci. Tech., 24(8)
  • Gaoliang Dai, Wolfgang Häßler-Grohne, Dorothee Hüser et al. 2012, New developments at Physikalisch Technische Bundesanstalt in three-dimensional atomic force microscopy with tapping and torsion atomic force microscopy mode and vector approach probing strategy, J. Micro/Nanolith. MEMS MOEMS 11(1), 011004
  • Gaoliang Dai, Hans-Ulrich Danzebrink, Jens Fluegge and Harald Bosse, 2012 Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM, Int. J. Nanomanufacturing 8, Nos. 5/6, 372-91
  • Wolfgang Häßler-Grohne, Dorothee Hüser, Gaoliang Dai, et al.  2011 Investigation of the cantilever response of non-contact atomic force microscopy for topography measurements in all three dimensions, Meas. Sci. Technol. 22 094006
  • Gaoliang Dai, Wolfgang Häßler-Grohne, Dorothee Hüser, et al. 2011 Development of a 3D-AFM for true 3D measurements of nanostructures, Meas. Sci. Technol. 22 094009
  • Ichiko Misumi, Gaoliang Dai, Mingzi Lu et al. 2010 Bilateral comparison of 25 nm pitch nanometric lateral scales for metrologicalscanning probe microscopes. Meas. Sci. Technol. 21, 035105
  • Gaoliang Dai, Helmut Wolff, Frank Pohlenz, et al. 2009  A metrological large range AFM with improved performance, Review of Scientific Instrument 80, 043702
  • Gaoliang Dai, Sebastian Bütefisch, Frank Pohlenz, et al. 2009 A high precision micro/nano CMM using piezoresistive tactile probes, Meas. Sci. Technol. 20, 084001
  • Gaoliang Dai, Sebastian Bütefisch, Frank Pohlenz et al. 2009 Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und Nanokoordinatenmessgerät; Technisches Messen 76, 43-53
  • M Xu, T Dziomba, G Dai et al. 2008 Self-calibration of scanning probe microscope: mapping the errors of the instrument, Measurement Science and Technology 19, 025105
  • Gaoliang Dai, Helmut Wolff, Thomas Weimann, et al. 2007 Nanoscale surface measurements at sidewalls of nano and micro structures, Meas. Sci. Technol. 18, 334–41
  • Gaoliang Dai, F Pohlenz, Thorsten Dziomba, Min Xu et al. 2007 Accurate and traceable calibration of two-dimensional gratings, Meas. Sci. Technol. 18,  415–21
  • C G Frase, W Haessler-Grohne, G Dai  et al.  2007 SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 μm, Meas. Sci. Technol. 18,  439–47
  • Gaoliang Dai, Helmut Wolff, and Hans-Ulrich Danzebrink 2007 Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures, Appl. Phys. Lett. 91, 121912
  • Gaoliang Dai, Frank Pohlenz, Min Xu et al. 2006 Accurate and traceable measurement of nano- and microstructures, Meas. Sci. Technol. 17, 545–52