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AG 5.11 Literaturverweise [1]-[16]

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[1]    L. Doering u. a., „High-speed microprobe for roughness measurements in high-aspect-ratio microstructures“, Meas. Sci. Technol., Bd. 28, Nr. 3, S. 034009, März 2017.


[2]    „Kalibrierung der Biegesteifigkeit von AFM-Cantilevern mit MEMS-Referenzfederaktoren - PTB.de“. [Online]. Einsehbar unter: www.ptb.de/cms/ptb/fachabteilungen/abt5/archiv-der-nachrichten-aus-abteilung-5/archiv-der-forschungsnachrichten.html. [Zugegriffen: 20-Apr-2017].


[3]    S. Gao u. a., „A comb-drive scanning-head array for fast scanning-probe microscope measurements“, 2011, S. 806626-806626–8.


[4]    Z. Li, S. Gao, U. Brand, K. Hiller, N. Wollschläger, und F. Pohlenz, „Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip“, Rev. Sci. Instrum., Bd. 88, Nr. 3, S. 036104, März 2017.


[5]    S. Gao, U. Brand, S. Hahn, und K. Hiller, „An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers“, in SPIE 9517 Smart sensors, Actuators and MEMS VII; and Cyber Physical Systems, 2015, S. 951719.


[6]    P. Thomsen-Schmidt, „Characterization of a traceable profiler instrument for areal roughness measurement“, Meas. Sci. Technol., Bd. 22, Nr. 9, S. 094019, Sep. 2011.


[7]    Z. Li, U. Brand, und T. Ahbe, „Towards quantitative modelling of surface deformation of polymer micro-structures under tactile scanning measurement“, Meas. Sci. Technol., Bd. 25, S. 044010 (7pp), 2014.


[8]    Z. Li, U. Brand, und T. Ahbe, „Step height measurement of microscale thermoplastic polymer specimens using contact stylus profilometry“, Precis. Eng., Bd. 45, S. 110–117, Juli 2016.
[9]    U. Brand u. a., „Smart sensors and calibration standards for high precision metrology“, 2015, Bd. Proc. SPIE 9517, S. 95170V–95170V–10.


[10]    G. Hamdana u. a., „Double-meander spring silicon piezoresistive sensors as microforce calibration standards“, Opt. Eng., Bd. 55, Nr. 9, S. 091409, Mai 2016.


[11]    U. Brand, Z. Li, S. Gao, S. Hahn, und K. Hiller, „Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range“, Meas. Sci. Technol., Bd. 27, Nr. 1, S. 015601, Jan. 2016.


[12]    U. Brand u. a., „Sensors and calibration standards for precise hardness and topography measurements in micro- and nanotechnology - IEEE Xplore Document“, in Micro-Nano-Integration; 6. GMM-Workshop; Proceedings of, 2016, S. 68–72.


[13]    V. Nesterov, „Facility and methods for the measurement of micro and nano forces in the range below 10-5 N with a resolution of 10-12 N (development concept)“, Meas. Sci. Technol., Bd. 17, S. 360–366, 2006.


[14]    V. Nesterov, S. Buetefisch, und L. Koenders, „A nanonewton force facility to test Newton’s law of gravity at micro- and submicrometer distances“, Ann. Phys., Bd. 525, Nr. 8–9, S. 728–737, Sep. 2013.


[15]    D. Nies u. a., „Experimental setup for the direct measurement of a light-induced attractive force between two metal bodies“, 2016, S. 99222L.


[16]    D. Shapiro, D. Nies, O. Belai, M. Wurm, und V. Nesterov, „Optical field and attractive force at the subwavelength slit“, Opt. Express, Bd. 24, Nr. 14, S. 15972, Juli 2016.

 

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