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Übersichtsartikel: Quantitative Mikroskopie und dimensionale Nanometrologie

Publikations Einzelansicht

Beitrag zu Tagungsband

Titel: Current developments in linewidth metrology at the PTB
Autor(en): W. Häßler-Grohne, C. G. Frase, S. Czerkas, K. Dirscherl, B. Bodermann, E. Buhr, G. Ehret, M. Wurm, H. Bosse
Jahr: 2006
Buchtitel: Proceedings of the 6th international conference, European Society for Precision Engineering and Nanotechnology EUSPEN
Band: 1
Seite(n): 374 - 377
Verlag: Bedford: Euspen
Veranstaltungsname: 6th international conference, European Society for Precision Engineering and Nanotechnology
Veranstaltungsort: Vienna, Austria
Veranstaltungsdatum: May 28th - June 1st, 2006
ISBN: 0-9553082-0-8
Zusammenfassung: In this contribution we will describe the physical models and the instrumentation which were developed for photomask linewidth metrology at the PTB. It will be shown, how the results of the different methods can be used for cross-calibration analysis. Application of the methods will be demonstrated exemplarily on the basis of a newly developed photomask linewidth standard.

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