Titel: |
Current developments in linewidth metrology at the PTB |
Autor(en): |
W. Häßler-Grohne, C. G. Frase, S. Czerkas, K. Dirscherl, B. Bodermann, E. Buhr, G. Ehret, M. Wurm, H. Bosse |
Jahr: |
2006 |
Buchtitel: |
Proceedings of the 6th international conference, European Society for Precision Engineering and Nanotechnology EUSPEN |
Band: |
1 |
Seite(n): |
374 - 377 |
Verlag: |
Bedford: Euspen |
Veranstaltungsname: |
6th international conference, European Society for Precision Engineering and Nanotechnology |
Veranstaltungsort: |
Vienna, Austria |
Veranstaltungsdatum: |
May 28th - June 1st, 2006 |
ISBN: |
0-9553082-0-8 |
Zusammenfassung: |
In this contribution we will describe the physical models and the instrumentation which were developed for photomask linewidth metrology at the PTB. It will be shown, how the results of the different methods can be used for cross-calibration analysis. Application of the methods will be demonstrated exemplarily on the basis of a newly developed photomask linewidth standard. |