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Modellierung

Referenzen
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M. Hammerschmidt, P.-I. Schneider, M. Wurm, B. Bodermann, M. Bär, S. Heidenreich, N. Farchmin
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N. Farchmin, S. Heidenreich, M. Hammerschmidt, M. Wurm, B. Bodermann, M. Bär
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M. Hammerschmidt, M. Weiser, X. Garcia Santiago, L. Zschiedrich, B. Bodermann, S. Burger
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S. Heidenreich, H. Gross, M. Wurm, B. Bodermann, M. Baer
SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology V, Munich, Germany, 22-25, June 2015
Modeling Aspects in Optical Metrology V; Proceedings of SPIE Band 9526 (2015) , Seite 95260U
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S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, B. Bodermann
SPIE Metrology, Inspection, and Process Control for Microlithography XXVII, San Diego, Calif., USA, 24-28, February, 2013
Metrology, inspection, and process control for microlithography XXVII; Proceedings of SPIE Band 8681 aus 1 (2013) , Seite 868119-1 - 868119-7
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M.-A. Henn, H. Gross, F. Scholze, M. Wurm, C. Elster, M. Baer
Optics Express 20(12), 12771 - 12786 ( 2012)
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H. Gross, M.-A. Henn, A. Rathsfeld, F. Scholze, B. Bodermann, M. Baer
7th EOS Topical Meeting on Diffractive Optics 2010, Koli, Finland, 14-18, February, 2010
EOS Topical Meeting on Diffractive Optics 2010 (2010)

[CD-ROM] file name: Koli Gross Hermann 2483.pdf, 2 S.

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H. Gross, R. Model, F. Scholze, M. Wurm, B. Bodermann, M. Baer, A. Rathsfeld
Sensoren und Messsysteme 2008 : 14. Fachtagung Ludwigsburg; VDI-Berichte 2011, 337 - 346 ( 2008)

(VDI-Berichte: 2011)

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R. Model, A. Rathsfeld, H. Gross, M. Wurm, B. Bodermann
Journal of Physics: Conference Series 135 ( 2008)

012071, 8 S.

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R. Model, A. Rathsfeld, H. Gross, M. Wurm, B. Bodermann
6th International Conference on Inverse Problems in Engineering, Dourdan, France, 15-19, June, 2008
Proceedings of ICIPE 2008 (2008) , Seite Paper 77
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G. Ehret, B. Bodermann, M. Woehler
Modeling Aspects in Optical Metrology, Munich, Germany, 18-19, June, 2007
Modeling aspects in optical metrology : [papers from the SPIE Conference on Optical Metrology, held as part of the 18th International Congress on Photonics in Europe]; Proceedings of SPIE Band 6617 (2007) , Seite 661710-1 - 661710-11
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B. Bodermann, H. Bosse
Modeling Aspects in Optical Metrology, Munich, Germany, 18-19, June, 2007
Modeling aspects in optical metrology : [papers from the SPIE Conference on Optical Metrology, held as part of the 18th International Congress on Photonics in Europe]; Proceedings of SPIE Band 6617 (2007) , Seite 66170Y-1 - 66170Y-10
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