Referenzen
SPIE Conference on Scanning Microscopies, Monterey, USA, 29, September - 01, October, 2015
Scanning Microscopies 2015 ; (Proceedings of SPIE
Band 9636
(2015)
, Seite 96360S-1 - 96360S -14
DOI: 10.1117/12.2199453
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Optics and Photonics 2015, San Diego, USA, 09-13, August, 2015
Nanoengineering: Fabrication, Properties, Optics, and Devices XII ; Proceedings of SPIE
Band 9556
(2015)
DOI: 10.1117/12.2190409
[CD-ROM] file name 9556_38.pdf, 955610-1 - 955610-12Copyright: SPIE, The International Society for Optical Engineering |
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Frontiers of Characterization and Metrology for Nanoelectronics 2015, Dresden, Germany, 14-16, April, 2015
Frontiers of characterization and metrology for nanoelectronics 2015
(2015)
, Seite 125-127
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SPIE Photonics Europe, Brussels, Belgium, 14-17, April, 2014
Optical Micro- and Nanometrology V ; Proceedings of SPIE
Band 9132
(2014)
DOI: 10.1117/12.2052278
91320A-1 - 91320A-12 |
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SPIE Optics and Photonics 2012, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, Calif., USA, 12-16, August, 2012
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI ; Proceedings of SPIE
Band 8466
(2012)
DOI: 10.1117/12.929903
84660E-1 - 84660E-12 |
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SPIE Conference on Photomask Technology 2009, Monterey, USA, 14-18, September, 2009
Photomask Technology 2009 ; Proceedings of SPIE on CD-ROM
Band 7488
(2009)
DOI: 10.1117/12.831373
[CD-ROM] file name: 7488-51.pdf, 74881H-1 - 74881H-14 |
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SPIE Conference on Photomask Technology 2008, Monterey, USA, 06-10, October, 2008
Photomask Technology 2008 ; Proceedings of SPIE on CD-ROM
Band 7122
(2008)
DOI: 10.1117/12.801435
[CD-ROM] file name: 7122_97.pdf, 71222P-1 - 71222P-14 |
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23th European Mask and Lithography Conference EMLC (Former EMC), Grenoble, France, 22-25, January, 2007
EMLC 2007 : 23th European Mask and Lithography Conference ; Proceedings of SPIE
Band 6533
(2007)
DOI: 10.1117/12.736931
[CD-ROM] file name: 6533_53.pdf, 65330S-1 - 65330S-10 |
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22th European Mask and Lithography Conference EMLC (Former EMC), Dresden, Germany, 23-26, January, 2005
EMLC 2006 : 22th European Mask and Lithography Conference EMLC ; GMM-Fachbericht: 49 oder als Proc. SPIE 6281
(2006)
, Seite 103-114
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21th European Mask and Lithography Conference EMLC (Former EMC), Dresden, Germany, 31, January - 03, February, 2005
EMLC 2005 : 21th European Mask and Lithography Conference EMLC (former EMC) ; GMM-Fachbericht
Band 45
(2005)
, Seite 109-119
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25th Annual BACUS Symposium Photomask Technology, Monterey, USA, 04-07, October, 2005
BACUS Symposium on Photomask Technology 2005 and Photomask Japan ; Proceedings of SPIE
Band 5992
(2005)
, Seite 159
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PTB-Mitteilungen 114(1), 36-43 ( 2004) |